{"id":6983,"date":"2021-02-25T16:43:36","date_gmt":"2021-02-25T16:43:36","guid":{"rendered":"http:\/\/eds.kpi.ua\/?page_id=6983"},"modified":"2021-02-25T18:07:31","modified_gmt":"2021-02-25T18:07:31","slug":"cold-cathode-glow-discharge-electron-guns-and-its-using-in-technological-equipment","status":"publish","type":"page","link":"https:\/\/eds.kpi.ua\/?page_id=6983","title":{"rendered":"Cold cathode glow discharge electron guns and its` using in technological equipment"},"content":{"rendered":"<div class=\"vce-row-container\"><div class=\"vce-row vce-row--col-gap-30 vce-row-columns--top vce-row-content--top\" id=\"el-53622350\" data-vce-do-apply=\"all el-53622350\"><div class=\"vce-row-content\" data-vce-element-content=\"true\"><div class=\"vce-col vce-col--md-auto vce-col--xs-1 vce-col--xs-last vce-col--xs-first vce-col--sm-last vce-col--sm-first vce-col--md-last vce-col--lg-last vce-col--xl-last vce-col--md-first vce-col--lg-first vce-col--xl-first\" id=\"el-cb61a6d7\"><div class=\"vce-col-inner\" data-vce-do-apply=\"border margin background  el-cb61a6d7\"><div class=\"vce-col-content\" data-vce-element-content=\"true\" data-vce-do-apply=\"padding el-cb61a6d7\"><div class=\"vce-text-block\"><div class=\"vce-text-block-wrapper vce\" id=\"el-8f146d31\" data-vce-do-apply=\"all el-8f146d31\"><p><span style=\"font-size: 14pt;\"><strong>Glow discharge electron guns with cold cathodes<\/strong> are used for welding, brazing, evaporation, melting of refractory metals, as well as other technological operations which are provided by electron beam in a soft vacuum or controlled gas medium. High voltage glow discharge with anode plasma maintained in pressure range of few Pa and accelerations voltages units-tens of kV is used in such guns for generation of electron beam. Cold cathode from metal is used there as an emitter of free electrons. Therefore, emission of electrons is a result of bombarding of cathode surface by the ions from anode plasma. Plasma have a near-anode potential, so discharge region can be considered as an electron-optical system with a transparent anode. According to wide range of operation voltage and pressure, glow discharge electron gun's power can be in range of from hundreds of watt to hundreds of kilowatt. Minimal diameter of electron beam in crossover can be less then 1 mm<sup>2<\/sup>, and so maximum power density - 10<sup>6&nbsp;<\/sup>W\/cm<sup>2<\/sup>. Elaborated electron guns are completed by the electronic control systems.<\/span><\/p><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><div class=\"vce-row-container\"><div class=\"vce-row vce-row--col-gap-30 vce-row-columns--top vce-row-content--top\" id=\"el-20f6c3a3\" data-vce-do-apply=\"all el-20f6c3a3\"><div class=\"vce-row-content\" data-vce-element-content=\"true\"><div class=\"vce-col vce-col--md-auto vce-col--xs-1 vce-col--xs-last vce-col--xs-first vce-col--sm-last vce-col--sm-first vce-col--md-first vce-col--lg-first vce-col--xl-first\" id=\"el-adc9d331\"><div class=\"vce-col-inner\" data-vce-do-apply=\"border margin background  el-adc9d331\"><div class=\"vce-col-content\" data-vce-element-content=\"true\" data-vce-do-apply=\"padding el-adc9d331\"><div class=\"vce-single-image-container vce-single-image--align-left\"><div class=\"vce vce-single-image-wrapper\" id=\"el-6ee496ee\" data-vce-do-apply=\"all el-6ee496ee\"><figure><div class=\"vce-single-image-inner vce-single-image--absolute\" style=\"padding-bottom: 161.514%; width: 634px;\"><img class=\"vce-single-image\" width=\"634\" height=\"1024\"src=\"https:\/\/eds.kpi.ua\/wp-content\/uploads\/2021\/02\/Electron_gun-1-634x1024.jpg\" srcset=\"https:\/\/eds.kpi.ua\/wp-content\/uploads\/2021\/02\/Electron_gun-1-320x517.jpg 320w,https:\/\/eds.kpi.ua\/wp-content\/uploads\/2021\/02\/Electron_gun-1-480x775.jpg 480w,https:\/\/eds.kpi.ua\/wp-content\/uploads\/2021\/02\/Electron_gun-1-634x1024.jpg 634w\" data-img-src=\"https:\/\/eds.kpi.ua\/wp-content\/uploads\/2021\/02\/Electron_gun-1.jpg\" alt=\"\" title=\"Electron_gun-1\" \/><\/div><figcaption hidden=\"\"><\/figcaption><\/figure><\/div><\/div><\/div><\/div><\/div><div class=\"vce-col vce-col--md-auto vce-col--xs-1 vce-col--xs-last vce-col--xs-first vce-col--sm-last vce-col--sm-first vce-col--md-last vce-col--lg-last vce-col--xl-last\" id=\"el-ca84e22c\"><div class=\"vce-col-inner\" data-vce-do-apply=\"border margin background  el-ca84e22c\"><div class=\"vce-col-content\" data-vce-element-content=\"true\" data-vce-do-apply=\"padding el-ca84e22c\"><div class=\"vce-text-block\"><div class=\"vce-text-block-wrapper vce\" id=\"el-c91ac6d6\" data-vce-do-apply=\"all el-c91ac6d6\"><p><span style=\"font-size: 14pt;\"><strong>Main advantages of guns are:<\/strong><\/span><\/p><p style=\"padding-left: 40px;\"><span style=\"font-size: 14pt;\">- simplicity of construction;<\/span><\/p><p style=\"padding-left: 40px;\"><span style=\"font-size: 14pt;\">- high reliability of cold cathodes that operated in the soft vacuum;<\/span><\/p><p style=\"padding-left: 40px;\"><span style=\"font-size: 14pt;\">- possibility of operation in medium of different gases, including active ones.<\/span><\/p><h2>&nbsp;<\/h2><p><span style=\"font-size: 14pt;\"><strong>Main applications of electron guns today are: <\/strong><\/span><\/p><p style=\"padding-left: 40px;\"><span style=\"font-size: 14pt;\">- melting and refusion of titanium, zirconium, molybdenum, tantalum, silicon etc.<\/span><\/p><p style=\"padding-left: 40px;\"><span style=\"font-size: 14pt;\">- obtaining of oxide, nitride, carbide, other ceramics, metals and polymetals films.&nbsp;<\/span><\/p><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><div class=\"vce-row-container\"><div class=\"vce-row vce-row--col-gap-30 vce-row-columns--top vce-row-content--top\" id=\"el-711a63f9\" data-vce-do-apply=\"all el-711a63f9\"><div class=\"vce-row-content\" data-vce-element-content=\"true\"><div class=\"vce-col vce-col--md-auto vce-col--xs-1 vce-col--xs-last vce-col--xs-first vce-col--sm-last vce-col--sm-first vce-col--md-last vce-col--lg-last vce-col--xl-last vce-col--md-first vce-col--lg-first vce-col--xl-first\" id=\"el-e31a0c26\"><div class=\"vce-col-inner\" data-vce-do-apply=\"border margin background  el-e31a0c26\"><div class=\"vce-col-content\" data-vce-element-content=\"true\" data-vce-do-apply=\"padding el-e31a0c26\"><div class=\"vce-text-block\"><div class=\"vce-text-block-wrapper vce\" id=\"el-dc6685ec\" data-vce-do-apply=\"all el-dc6685ec\"><p><span style=\"font-size: 14pt;\">The technological equipment with glow discharge electron guns for welding, evaporation and melting is put into operation in different plants of Ukraine, Russia, Armenia, Germany, Japan, USA. One of elaborated electron gun with 100 kW power, operated in industry today, is presented on photograph.<\/span><\/p><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><div class=\"vce-row-container\"><div class=\"vce-row vce-row--col-gap-30 vce-row-columns--top vce-row-content--middle\" id=\"el-7b3a3609\" data-vce-do-apply=\"all el-7b3a3609\"><div class=\"vce-row-content\" data-vce-element-content=\"true\"><div class=\"vce-col vce-col--md-auto vce-col--xs-1 vce-col--xs-last vce-col--xs-first vce-col--sm-last vce-col--sm-first vce-col--md-first vce-col--lg-first vce-col--xl-first\" id=\"el-7e8ff502\"><div class=\"vce-col-inner\" data-vce-do-apply=\"border margin background  el-7e8ff502\"><div class=\"vce-col-content\" data-vce-element-content=\"true\" data-vce-do-apply=\"padding el-7e8ff502\"><div class=\"vce-text-block\"><div class=\"vce-text-block-wrapper vce\" id=\"el-f574dd2f\" data-vce-do-apply=\"all el-f574dd2f\"><p style=\"text-align: center;\"><span style=\"font-size: 14pt;\"><strong>Parameters of elaborated electron guns<\/strong><\/span><\/p><p>&nbsp;<\/p><table border=\"1\"><tbody><tr><td style=\"text-align: center;\" width=\"34\"><p><span style=\"font-size: 14pt;\"><strong>No<\/strong><\/span><\/p><\/td><td style=\"text-align: center;\" width=\"190\"><p><span style=\"font-size: 12pt;\"><strong>Parameter<\/strong><\/span><\/p><\/td><td style=\"text-align: center;\" width=\"66\"><p><span style=\"font-size: 12pt;\"><strong>EH-30<\/strong><\/span><\/p><\/td><td style=\"text-align: center;\" width=\"76\"><p><span style=\"font-size: 12pt;\"><strong>EH-60<\/strong><\/span><\/p><\/td><td style=\"text-align: center;\" width=\"71\"><p><span style=\"font-size: 12pt;\"><strong>EH-100<\/strong><\/span><\/p><\/td><\/tr><tr><td style=\"text-align: center;\" width=\"34\"><p><span style=\"font-size: 14pt;\">1.<\/span><\/p><\/td><td width=\"190\"><p><span style=\"font-size: 12pt;\">Maximal power, kW<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"66\"><p><span style=\"font-size: 12pt;\">30<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"76\"><p><span style=\"font-size: 12pt;\">60<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"71\"><p><span style=\"font-size: 12pt;\">100<\/span><\/p><\/td><\/tr><tr><td style=\"text-align: center;\" width=\"34\"><p><span style=\"font-size: 14pt;\">2.<\/span><\/p><\/td><td width=\"190\"><p><span style=\"font-size: 12pt;\">Range of power regulation, kW<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"66\"><p><span style=\"font-size: 12pt;\">0 \u2013 30<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"76\"><p><span style=\"font-size: 12pt;\">0 \u2013 60<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"71\"><p><span style=\"font-size: 12pt;\">0 \u2013 100<\/span><\/p><\/td><\/tr><tr><td style=\"text-align: center;\" width=\"34\"><p><span style=\"font-size: 14pt;\">3.<\/span><\/p><\/td><td width=\"190\"><p><span style=\"font-size: 12pt;\">Acceleration voltage, kV<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"66\"><p><span style=\"font-size: 12pt;\">30<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"76\"><p><span style=\"font-size: 12pt;\">30<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"71\"><p><span style=\"font-size: 12pt;\">30<\/span><\/p><\/td><\/tr><tr><td style=\"text-align: center;\" width=\"34\"><p><span style=\"font-size: 14pt;\">4.<\/span><\/p><\/td><td width=\"190\"><p><span style=\"font-size: 12pt;\">Maximal angle of beam deflection, degree<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"66\"><p><span style=\"font-size: 12pt;\">20<sup>0<\/sup><\/span><\/p><\/td><td style=\"text-align: center;\" width=\"76\"><p><span style=\"font-size: 12pt;\">20<sup>0<\/sup><\/span><\/p><\/td><td style=\"text-align: center;\" width=\"71\"><p><span style=\"font-size: 12pt;\">20<sup>0<\/sup><\/span><\/p><\/td><\/tr><tr><td style=\"text-align: center;\" width=\"34\"><p><span style=\"font-size: 14pt;\">5.<\/span><\/p><\/td><td width=\"190\"><p><span style=\"font-size: 12pt;\">Operation gas<\/span><\/p><\/td><td style=\"text-align: center;\" colspan=\"3\" width=\"213\"><p><span style=\"font-size: 14pt;\">Technical hydrogen<\/span><\/p><\/td><\/tr><tr><td style=\"text-align: center;\" width=\"34\"><p><span style=\"font-size: 14pt;\">6.<\/span><\/p><\/td><td width=\"190\"><p><span style=\"font-size: 12pt;\">Maximal gas expense, m<sup>3<\/sup>\u2219Pa\/sec<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"66\"><p><span style=\"font-size: 12pt;\">0.1<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"76\"><p><span style=\"font-size: 12pt;\">0.15<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"71\"><p><span style=\"font-size: 12pt;\">0.3<\/span><\/p><\/td><\/tr><tr><td style=\"text-align: center;\" width=\"34\"><p><span style=\"font-size: 14pt;\">7.<\/span><\/p><\/td><td width=\"190\"><p><span style=\"font-size: 12pt;\">Range of pressure in technological chamber, Pa<\/span><\/p><\/td><td style=\"text-align: center;\" colspan=\"3\" width=\"213\"><p><span style=\"font-size: 12pt;\">1 \u2013 10<sup>-2<\/sup><\/span><\/p><\/td><\/tr><tr><td style=\"text-align: center;\" width=\"34\"><p><span style=\"font-size: 14pt;\">8.<\/span><\/p><\/td><td width=\"190\"><p><span style=\"font-size: 12pt;\">Expense of cooling water, m<sup>3<\/sup>\/sec<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"66\"><p><span style=\"font-size: 12pt;\">0.1<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"76\"><p><span style=\"font-size: 12pt;\">0.15\u221910<sup>-3<\/sup><\/span><\/p><\/td><td style=\"text-align: center;\" width=\"71\"><p><span style=\"font-size: 12pt;\">0.3\u221910<sup>-3<\/sup><\/span><\/p><\/td><\/tr><tr><td style=\"text-align: center;\" width=\"34\"><p><span style=\"font-size: 14pt;\">9.<\/span><\/p><\/td><td width=\"190\"><p><span style=\"font-size: 12pt;\">Higher, mm<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"66\"><p><span style=\"font-size: 12pt;\">450<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"76\"><p><span style=\"font-size: 12pt;\">450<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"71\"><p><span style=\"font-size: 12pt;\">500<\/span><\/p><\/td><\/tr><tr><td style=\"text-align: center;\" width=\"34\"><p><span style=\"font-size: 14pt;\">10.<\/span><\/p><\/td><td width=\"190\"><p><span style=\"font-size: 12pt;\">Weight, kg<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"66\"><p><span style=\"font-size: 12pt;\">15<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"76\"><p><span style=\"font-size: 12pt;\">17<\/span><\/p><\/td><td style=\"text-align: center;\" width=\"71\"><p><span style=\"font-size: 12pt;\">22<\/span><\/p><\/td><\/tr><\/tbody><\/table><\/div><\/div><\/div><\/div><\/div><div class=\"vce-col vce-col--md-auto vce-col--xs-1 vce-col--xs-last vce-col--xs-first vce-col--sm-last vce-col--sm-first vce-col--md-last vce-col--lg-last vce-col--xl-last\" id=\"el-2f554be0\"><div class=\"vce-col-inner\" data-vce-do-apply=\"border margin background  el-2f554be0\"><div class=\"vce-col-content\" data-vce-element-content=\"true\" data-vce-do-apply=\"padding el-2f554be0\"><div class=\"vce-single-image-container vce-single-image--align-left\"><div class=\"vce vce-single-image-wrapper\" id=\"el-2c8e8504\" data-vce-do-apply=\"all el-2c8e8504\"><figure><div class=\"vce-single-image-inner vce-single-image--absolute\" style=\"padding-bottom: 67.6758%; width: 1024px;\"><img class=\"vce-single-image\" width=\"1024\" height=\"693\"src=\"https:\/\/eds.kpi.ua\/wp-content\/uploads\/2021\/02\/Electron_gun-2-1024x693.jpg\" srcset=\"https:\/\/eds.kpi.ua\/wp-content\/uploads\/2021\/02\/Electron_gun-2-320x217.jpg 320w,https:\/\/eds.kpi.ua\/wp-content\/uploads\/2021\/02\/Electron_gun-2-480x325.jpg 480w,https:\/\/eds.kpi.ua\/wp-content\/uploads\/2021\/02\/Electron_gun-2-800x541.jpg 800w,https:\/\/eds.kpi.ua\/wp-content\/uploads\/2021\/02\/Electron_gun-2-1024x693.jpg 1024w\" data-img-src=\"https:\/\/eds.kpi.ua\/wp-content\/uploads\/2021\/02\/Electron_gun-2.jpg\" alt=\"\" title=\"Electron_gun-2\" \/><\/div><figcaption hidden=\"\"><\/figcaption><\/figure><\/div><\/div><\/div><\/div><\/div><\/div><\/div><\/div><div class=\"vce-row-container\"><div class=\"vce-row vce-row--col-gap-30 vce-row-columns--top vce-row-content--top\" id=\"el-a0cf8ab5\" data-vce-do-apply=\"all el-a0cf8ab5\"><div class=\"vce-row-content\" data-vce-element-content=\"true\"><div class=\"vce-col vce-col--md-auto vce-col--xs-1 vce-col--xs-last vce-col--xs-first vce-col--sm-last vce-col--sm-first vce-col--md-last vce-col--lg-last vce-col--xl-last vce-col--md-first vce-col--lg-first vce-col--xl-first\" id=\"el-7ebc60d3\"><div class=\"vce-col-inner\" data-vce-do-apply=\"border margin background  el-7ebc60d3\"><div 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High voltage glow <a href=\"https:\/\/eds.kpi.ua\/?page_id=6983\" class=\"read-more\">Read More &#8230;<\/a><\/p>\n","protected":false},"author":3,"featured_media":0,"parent":1171,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"footnotes":""},"class_list":["post-6983","page","type-page","status-publish","hentry"],"_links":{"self":[{"href":"https:\/\/eds.kpi.ua\/index.php?rest_route=\/wp\/v2\/pages\/6983","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/eds.kpi.ua\/index.php?rest_route=\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/eds.kpi.ua\/index.php?rest_route=\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/eds.kpi.ua\/index.php?rest_route=\/wp\/v2\/users\/3"}],"replies":[{"embeddable":true,"href":"https:\/\/eds.kpi.ua\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=6983"}],"version-history":[{"count":4,"href":"https:\/\/eds.kpi.ua\/index.php?rest_route=\/wp\/v2\/pages\/6983\/revisions"}],"predecessor-version":[{"id":6991,"href":"https:\/\/eds.kpi.ua\/index.php?rest_route=\/wp\/v2\/pages\/6983\/revisions\/6991"}],"up":[{"embeddable":true,"href":"https:\/\/eds.kpi.ua\/index.php?rest_route=\/wp\/v2\/pages\/1171"}],"wp:attachment":[{"href":"https:\/\/eds.kpi.ua\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=6983"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}